On Analysis of Applying Iterative Learning Control to a Closed-Loop Three-Phase Linear Stepper-Motor

Interposers, crucial for connecting multiple chips, e.g., CPUs and memory, are expected to play a critical role for further improving the performance of integrated circuits. Seeking cost-effective and high-speed/high - precision manufacturing of next-generation interposers, this study aims to apply iterative learning control to a prototype three-phase linear stepper-motor. Experimental validation confirms desirable tracking performance to a noise-level-error by applying iterative learning control to the constructed closed-loop system.