Fabrication and evaluation of MoS₂ nanotube-based humidity sensors with two different electrode positions

Abstract Vertically aligned MoS 2 nanotube-based humidity sensors have been fabricated, and the dependence of the sensing performance on electrode positions was investigated. The MoS 2 nanotube arrays were prepared by coating on aluminum oxide (AAO) porous substrates using a decompression filtration technique. The two types of electrodes were formed in the horizontal and vertical positions. It was found that the humidity response for the vertical positions of the electrode is about 6.5 times more sensitive than the horizontal positions, resulting in higher sensitivity. In addition, the response of nanotubes with different thicknesses was compared, and it was found that the response of nanotubes with thicker films was about 5 times more sensitive than thinner films. In addition, the application of response detection by the approach of a finger was also carried out and demonstrated the potential of the MoS 2 nanotube humidity sensor and innovative humidity sensing technology.