Model Calibration of Inconsistent Coils Shape Driven by Coupling Effect of Magnetic Levitation Planar Motor

Magnetic levitation planar motor is a high – precision multi-degree-of-freedom (DOF) motion system in industry. But the motion decoupling via model-based commutation is compromised by the deviation of wrench model. In this paper, analysis reveals that nominal model is interfered by inconsistent coils shape and harmonic magnetic field can be calibrated with shape parameter by means of Genetic Algorithms. The calibrated parameter modifies the wrench error of single coils according to the Finite Element Analysis (FEA). Then, an off-line calibration strategy is proposed for the planar motor with multiple coils. Simulation validates that modeling error can be globally reduced, and the motion coupling is mitigated up to 91.8% according to the proposed metric of accuracy.