Analysis of Electromagnetic Force and Power Consumption in Magnetic Levitation Planar Motor with Dual-Layer Coil Array

As lithography equipment imposes increasingly stringent requirements on overlay accuracy, productivity, and efficiency, there is a growing demand for further improvements in the motion precision, acceleration, and power consumption of motion systems. The magnetic levitation planar motor (MLPM) attracts considerable attention from scholars due to its numerous advantages. While it inevitably exhibits fluctuations in electromagnetic force owing to its unique topology. This paper uses a high-precision electromagnetic model to analyze the relationship between the air gap magnetic field, electromagnetic force, and air gap height of the moving-coil MLPM. Additionally, it proposes a dual-layer coil array in conjunction with trajectory planning. In this configuration, the bottom-layer coil, positioned closer to the magnet array, provides high-amplitude and fluctuating horizontal driving force during the acceleration operating. In contrast, the top-layer coil, situated farther from the magnet array, offers low-amplitude and stable vertical suspension force during the constant-speed operation. Furthermore, considering the weight of the mover and payload, the paper analyzes the system power consumption of the MLPM with a dual-layer coil array. This study provides valuable insights for improving the motion precision and structural design of MLPM.