Vortex Light Output Based on Integrated Silicon Nitride Metasurface VCSEL

Abstract The latest development of integrated photonic device technology fully meets the market demand for com pact and efficient optoelectronic systems and also effectively promotes the development of optical metasurface tech nology.Among them the integration of vertical cavity surface emitting laser (VCSEL) and metasurface can generate vector beams with specific wavefronts which greatly enhances the functionality and flexibility of optoelectronic sys tems.In this paper an 850 nm VCSEL based on Si 3 N 4 nanoantenna array metasurface is designed.By adjusting the structural parameters of the nanoantenna more than 2 phase coverage is achieved and vortex beams of different or ders are successfully generated by using first-order and second-order vortex phase plates.This result provides a new idea for the optical metasurface control of VCSEL light field technology.