Influence of Blade row Stages on the Pumping Speed of Molecular Pump Based on Entire Blade Row Algorithm

Magnetic levitation turbomolecular pumps (MLTMPs) are widely used due to their advantages, and different application scenarios have different requirements for their pumping performance. The influence of blade number on pumping performance is crucial for the design of magnetic levitation turbo molecular pumps, but there is currently a lack of research in this area. The influence of the number of turbine blade arrays on the pumping speed of a molecular pump was studied using the overall blade array algorithm, and compared with the single-stage blade array algorithm. The results showed that the transmission probability of multiple blade arrays was only strongly correlated with the first two stages of blades. This provides guidance for the design of the turbine blade array of MLTMP