Three-Level All-SiC High-Frequency High-Voltage Plasma Power Supply System

Plasma power supplies are extensively utilized in various manufacturing and medical industries. Addressing the challenges of high-voltage and high-temperature resistance in current plasma power supply systems under high-frequency conditions, this study proposes a novel design method for an all-SiC high-frequency high-voltage plasma power supply system based on a three-level topology. Firstly, the design encompasses a three-level high-frequency inverter main circuit, a three-level high-frequency control main circuit, and a high-frequency high-voltage transformer. Subsequently, a high-frequency high-voltage plasma power supply system, equipped with a rotary motor, was developed and experimentally validated. Finally, the system achieved a stable power output with a frequency of 25 kHz, an output voltage of 21.03 kV, and an output power of 13.42 kW. The experimental results demonstrate that the plasma power supply system exhibits stable output voltage and maintains an operating temperature under high-frequency and high-voltage conditions.