Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment
The impact of electron blocking layer (EBL) thickness on the performance of GaN-based blue laser diodes is studied through both simulation and experimental approaches. From the simulation perspective, an increase in EBL thickness reduces electron current leakage but also shifts the optical field center toward the p-type side, leading to an increased optical loss. This contradictory effect results in the slope efficiency of the laser diode initially improved and then deteriorated as the EBL thickness increases, while the threshold current, which is significantly influenced by electron leakage, continues to be improved. In experiments, it is observed that the threshold current of the laser diode also exhibits a trend of decreasing at first and then increasing with the increase in EBL thickness. This is likely due to the increase in introduced defects caused by the increased thickness during film growth, which leads to more leakage current and nonradiative recombination centers. Based on the analysis of the effects of EBL thickness on laser performance, we successfully fabricated a 7.5 W GaN-based blue laser diode lasing at 438 nm at room temperature under continuous operation mode.
Authors
- Zongshun Liu (ORCID: https://orcid.org/0000-0003-4566-3927)
- Jing Yang (ORCID: https://orcid.org/0000-0003-3483-4276)
- Degang Zhao (ORCID: https://orcid.org/0000-0002-0752-3408)
- Zhenyu Chen (ORCID: https://orcid.org/0000-0001-6420-7260)
- Feng Liang (ORCID: https://orcid.org/0000-0002-2064-8918)
- Ping Chen (ORCID: https://orcid.org/0000-0002-7860-9815)
Institutions
- Chinese Academy of Sciences (CN)
- State Key Laboratory on Integrated Optoelectronics (CN)
- Institute of Semiconductors (CN)
- University of Chinese Academy of Sciences (CN)
Publication Details
- Journal
- Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
- Published
- 2025-03-24
- DOI
- https://doi.org/10.1116/6.0004426
- Citations
- 1
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 1.26
Funders
- National Natural Science Foundation of China
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- National Key Research and Development Program of China