Color centers and crystal structural transformations induced by femtosecond laser writing in 4H-SiC
Silicon carbide (SiC), a wide-bandgap semiconductor, is gaining importance in quantum technologies due to its promising color centers. Among SiC polytypes, 4H-SiC stands out with its wide bandgap and low impurities, making it ideal for color center research. Femtosecond laser direct writing enables precise creation of color centers, offering nanoscale accuracy. This study explores the optical properties and structural changes in 4H-SiC induced by laser writing. Techniques such as Raman spectroscopy, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy are used to analyze lattice damage and transformations, providing insights into precise color center fabrication and its implications for quantum applications.
Authors
- Qunsi Yang (ORCID: https://orcid.org/0000-0002-5227-6258)
- Weizong Xu (ORCID: https://orcid.org/0000-0001-5243-4984)
- Hai Lu (ORCID: https://orcid.org/0000-0002-9835-6763)
- Yiwang Wang
- Fei Xu (ORCID: https://orcid.org/0000-0001-5239-4572)
- Dong Zhou (ORCID: https://orcid.org/0000-0003-0410-1581)
- Xiufang Chen (ORCID: https://orcid.org/0000-0002-3789-2124)
- Hai‐Zhi Song (ORCID: https://orcid.org/0000-0003-1538-2470)
- Feng Zhou (ORCID: https://orcid.org/0000-0002-3159-0328)
- Junxian Luo
- Tao Tao (ORCID: https://orcid.org/0000-0001-8601-8583)
- Rong Zhang (ORCID: https://orcid.org/0000-0003-0015-6331)
- Fangfang Ren (ORCID: https://orcid.org/0000-0001-5598-9512)
- Xinghua Liu (ORCID: https://orcid.org/0000-0002-0274-2839)
- Jiandong Ye (ORCID: https://orcid.org/0000-0002-3985-6768)
- Jie Fu (ORCID: https://orcid.org/0000-0003-2608-1147)
- Qiang Xu (ORCID: https://orcid.org/0000-0003-4944-7738)
- Bin Liu (ORCID: https://orcid.org/0000-0002-9495-6809)
- Xiangang Xu
Institutions
- Shandong University (CN)
- Hefei University (CN)
- Collaborative Innovation Center of Advanced Microstructures (CN)
- Nanjing University (CN)
Publication Details
- Journal
- Journal of Applied Physics
- Published
- 2025-03-24
- DOI
- https://doi.org/10.1063/5.0256732
- Citations
- 4
- Primary Topic
- Diamond and Carbon-based Materials Research
- Type
- article
- Field-Weighted Citation Impact
- 2.07
Funders
- National Natural Science Foundation of China