Silicon integrated microwave photonics

Abstract The generation, processing, and measurement of microwave signals using optoelectronic technology on compact chips represent a significant trend in the evolution of microwave photonics (MWP). Among various platforms, silicon photonics has emerged as a leading choice, primarily due to its compatibility with established complementary metal-oxide-semiconductor (CMOS) processes. This compatibility enables the complete integration of high-performance radio frequency (RF) links while addressing key challenges such as size, power consumption, cost, and reliability. In this article, we review recent advancements in silicon-integrated microwave photonics, focusing on the developments of device-level integration and system-level applications. At the device level, we highlight critical innovations in silicon-based passive and active components towards MWP concerns, including ultralow-loss waveguides, high-fitness micro rings, large-bandwidth/high-linearity electro-optic modulators, hybrid/heterogeneous integrated lasers and amplifiers on silicon, frequency combs, and more. These breakthroughs form the basic foundation for advancing MWP system-level implementation. At the system-level applications, we concentrate on integrated MWP systems with diverse functionalities on silicon chips, including microwave signal generation, processing, programmable circuits, and measurement systems. Finally, we discuss current challenges and provide insights into the future of silicon-integrated MWP.