Development of bi-directional high overload silicon-based differential pressure sensitive element

Authors

Xiaodong Yang (ORCID: https://orcid.org/0000-0002-9142-5666)
Liqun Du (ORCID: https://orcid.org/0000-0003-0548-7797)
Aoqi Li (ORCID: https://orcid.org/0000-0001-6373-6638)
Meng Li (ORCID: https://orcid.org/0000-0003-2454-2157)
H. Qiu
Xianli Meng (ORCID: https://orcid.org/0000-0003-2600-6024)

Publication Details

Journal: Optics and Precision Engineering
Published: 2025-01-01
DOI: https://doi.org/10.37188/ope.20253302.0209
Primary Topic: Advanced MEMS and NEMS Technologies
Type: article
Field-Weighted Citation Impact: 0.00

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article

Development of bi-directional high overload silicon-based differential pressure sensitive element

Xiaodong Yang, Liqun Du, Aoqi Li, Meng Li et al.

Jan 1, 2025

Optics and Precision Engineering

Advanced MEMS and NEMS Technologies

article

Development of bi-directional high overload silicon-based differential pressure sensitive element

Xiaodong Yang, Liqun Du, Aoqi Li, Meng Li, H. Qiu, Xianli Meng

January 1, 2025article en

Abstract

No abstract available for this paper.

Optics and Precision EngineeringVol. 33(2)

Affordable and clean energy

Openalex Percentile: Top 96%

Advanced MEMS and NEMS Technologies

DOI Open Access PDF OpenAlex

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Development of bi-directional high overload silicon-based differential pressure sensitive element — Xiaodong Yang, Liqun Du, et al. · Optics and Precision Engineering (2025) | TGRS Research Map | TGRS