Mechanically induced subsurface crack channels for micro- and nanofluidics

While nanofluidics have been researched, these channels have been fabricated via complicated processes such as precision nano machining and wafer bonding. We successfully fabricated micro and nanometer-sized channels mechanically via diamond tool in the subsurface in glass. In this study, we applied these channels as nanofluidic channels. First, we characterized the channel size and found it can be controlled via mechanical scribing force. Then, we designed and fabricated a glass mini chip, including the formed crack channels connected with the inlet and outlet for fluid. The fluid’s behavior was investigated as a demonstration.