Fabrication of Bulk Acoustic Wave Resonator with Multilayer Graphene Electrode

Two bulk acoustic wave resonator (BAW) devices with multilayer graphene as bottom electrodes are fabricated using the chemical vapor deposition and pulsed laser deposition (PLD) methods. The multilayer graphene is confirmed to act as a Bragg reflector, which eliminates the necessity of introducing the traditional multiyear structure or creating an air cavity. Electrical tests reveal the existence of acoustic resonance on both devices at around 6 and 8.3 GHz. The results confirm that both multilayer graphene structures created by self‐folding and PLD methods are suitable for making BAWs. Thus, this study opens a new avenue for the application of multilayer graphene in microwave devices.