Determination of Energy Resolution of Continuous Tuning Ultraviolet Photoelectron Spectroscopy Instrument

The energy resolution of ultraviolet photoelectron spectroscopy (UPS) instrument is one of the important parameters for evaluating surface electronic structure. This study systematically explored the key factors that affect energy broadening, including the intrinsic broadening of the light source, the hot electron effect on the sample surface, and the resolution limit of the electron analyzer. By experimentally measuring the Fermi edge of the gold sample and using the nonlinear least squares fitting method of the convolution of the Fermi-Dirac distribution and the Gaussian function, we accurately evaluated the energy resolution of UPS. The results of this study provide a theoretical and experimental basis for further optimizing the energy resolution capability of ultraviolet photoelectron spectroscopy instruments.