Optimization of Electrodes for a New Cut Quartz Tuning Fork Temperature Sensor
Quartz tuning fork temperature sensor with frequency as the output signal is a digital temperature sensor with high quality factor, low volume, low power consumption and other advantages, which plays an crucial role in the field of high-precision temperature measurement. To improve the performance of quartz tuning fork resonator, this paper proposes a quartz tuning fork temperature sensor with cut ZYlw(−10°,-41°) and optimizes its surface electrodes in order to reduce the parasitic effects generated at the tuning fork base. Simulation results show that for a new cut quartz temperature sensor we propose, the optimized electrodes exhibit good resonance characteristics with improved sensitivity and quality factor Q compared to the before optimization, especially the Q value is improved significantly by 12%.
Authors
- Jie Yang (ORCID: https://orcid.org/0000-0003-4383-4745)
- Qizhou Wang (ORCID: https://orcid.org/0000-0003-4883-1068)
- Meng Zhao (ORCID: https://orcid.org/0000-0001-5242-8699)
- Ziyu Wang (ORCID: https://orcid.org/0000-0001-9718-1263)
- Jing Ji (ORCID: https://orcid.org/0000-0003-1004-8377)
- Jing Zhu
Institutions
- Xidian University (CN)
Publication Details
- Published
- 2024-10-31
- DOI
- https://doi.org/10.1109/icsmd64214.2024.10920487
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00