Polymer micro-ring resonator arrays-based ultrasonic detector arrays for parallel ultrasound detection (Conference Presentation)

Polymer micro-ring resonators (MRRs) are among the most versatile candidates for ultrasonic detections due to their high sensitivity over a wide frequency range, optical transparency, and at a miniaturized form-factor making it an idea point detector. While it is highly desirable to further develop it into an arrayed format, it requires precise control of the resonance mode for individual MRRs within the array so they can be uniquely addressed. Here, we report our recent work on developing a polymer MRR ultrasound detector array through the optimization of the nano-fabrication process, significantly improving dimensional tolerance. As the results, we demonstrated the ability to precisely controlled resonance modes of each of the MRR and thus, enables parallel ultrasound detection.