High throughput testing of Si photonics components using OFDR

This study experimentally analyzed the optical reflection at various silicon photonics components in a test element group using optical frequency-domain reflectometry (OFDR). The group refractive index and propagation loss of waveguides were evaluated more easily and quickly than in conventional transmission measurements. Losses in channel waveguides, bends, crossings, photonic crystal waveguides, and couplers were evaluated and compared to conventional methods’, with mostly matching results. This study suggests that OFDR can be a useful tool for high-throughput evaluation of any photonic devices and integrated circuits.

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Published
2025-03-20
DOI
https://doi.org/10.1117/12.3042713
Primary Topic
Integrated Circuits and Semiconductor Failure Analysis
Type
article
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article

High throughput testing of Si photonics components using OFDR

Toshihiko Baba, Mikiya Kamata, Tsubasa Sato, Shota Nawa
2 links
Integrated Circuits and Semiconductor Failure Analysis
article

High throughput testing of Si photonics components using OFDR

Toshihiko Baba, Mikiya Kamata, Tsubasa Sato, Shota Nawa
article en

Abstract

This study experimentally analyzed the optical reflection at various silicon photonics components in a test element group using optical frequency-domain reflectometry (OFDR). The group refractive index and propagation loss of waveguides were evaluated more easily and quickly than in conventional transmission measurements. Losses in channel waveguides, bends, crossings, photonic crystal waveguides, and couplers were evaluated and compared to conventional methods’, with mostly matching results. This study suggests that OFDR can be a useful tool for high-throughput evaluation of any photonic devices and integrated circuits.

Yokohama National University (JP)
Affordable and clean energy
Openalex Percentile: Top 96%
Integrated Circuits and Semiconductor Failure Analysis
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