High throughput testing of Si photonics components using OFDR
This study experimentally analyzed the optical reflection at various silicon photonics components in a test element group using optical frequency-domain reflectometry (OFDR). The group refractive index and propagation loss of waveguides were evaluated more easily and quickly than in conventional transmission measurements. Losses in channel waveguides, bends, crossings, photonic crystal waveguides, and couplers were evaluated and compared to conventional methods’, with mostly matching results. This study suggests that OFDR can be a useful tool for high-throughput evaluation of any photonic devices and integrated circuits.
Authors
- Toshihiko Baba (ORCID: https://orcid.org/0000-0002-2034-7381)
- Mikiya Kamata (ORCID: https://orcid.org/0000-0001-5386-3393)
- Tsubasa Sato (ORCID: https://orcid.org/0000-0003-4136-3150)
- Shota Nawa
Institutions
- Yokohama National University (JP)
Publication Details
- Published
- 2025-03-20
- DOI
- https://doi.org/10.1117/12.3042713
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00