3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer
We present a novel method for integrating Vertical Cavity Surface Emitting Lasers (VCSELs) into fused silica glass, combining precise embedding with the direct laser writing of polymer-based micro-optic elements. Custom-shaped cavities for GaAs-based VCSEL arrays (850nm) are formed via femtosecond laser irradiation and chemical etching. An electrical redistribution layer is created using polyimide coating, excimer laser via-drilling, TiW-Cu sputtering, and photolithographic patterning. Micro-optics for beam focusing are designed, fabricated via two-photon polymerization directly on the integrated VCSELs, and characterized.
Authors
- Geert Van Steenberge (ORCID: https://orcid.org/0000-0001-8574-1235)
- Athanasios Kyriazis (ORCID: https://orcid.org/0000-0001-8763-4003)
- Martin Virte (ORCID: https://orcid.org/0000-0001-5214-2295)
- Tushar Malica (ORCID: https://orcid.org/0000-0001-9482-9829)
- Jürgen Van Erps (ORCID: https://orcid.org/0000-0001-7186-5907)
- Salah Eddine Guessoum
Publication Details
- Published
- 2025-03-20
- DOI
- https://doi.org/10.1117/12.3041119
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Fonds Wetenschappelijk Onderzoek
- Vrije Universiteit Brussel
- Interreg