Off-Beam Acoustic Micro-Resonator for QEPAS Sensor with a Custom Quartz Tuning Fork

Quartz-enhanced photoacoustic spectroscopy (QEPAS) has shown great promise for monitoring greenhouse gases and pollutants with a high measurement accuracy and limit of detection. A QEPAS sensor, which can achieve high photoacoustic signal gain without requiring the laser beam to pass through the two prongs of a quartz tuning fork (QTF), is reported. A custom QTF with a resonant frequency of 7.2 kHz and a quality factor of 8406 was employed as a sound detection element, and the parameters of the acoustic micro-resonator (AmR) in the off-beam QEPAS spectrophone were optimized. A signal-to-noise ratio (SNR) gain of 16 was achieved based on the optimal AmR dimensions compared to the bare custom QTF. Water vapor (H2O) was detected utilizing the QEPAS sensor equipped with the off-beam spectrophone, achieving a minimum detection limit (MDL) of 4 ppm with a normalized noise equivalent absorption coefficient (NNEA) of 5.7 × 10−8 cm−1·W·Hz−1/2 at an integration time of 300 ms.