Wafer-scale and multi-Layer molybdenum disulfide film growth with layer number controllability up to 30 and its application in photodetectors with short response times

Wafer-scale MoS2 films are grown by sulfurizing amorphous MoS2 films deposited on sapphire substrates by using a radio-frequency sputtering system. Good layer number uniformity up to 30 layers is achieved. High responsivity 600 A/W and short rise/fall times < 10 ms are observed for the 10-layer MoS2/mono-layer graphene photodetector.