Study of Trajectories Scattered Ar+ Ions from the CdTe(001) <110> at the Glancing Incidence

The trajectories of particles scattered on ideal surfaces of CdTe (001) < 110> have been calculated. The characteristic trajectories was received for Ar + ions by initial energy 1 keV and at the angles of bombardment y=3 0 and 7 0 . This trajectories studied by using semichannel model. It was shown that the trajectories of scattered ions from the surface atomic row, from the wall of the semichannel and from the bottom of the semichannel differ from each other. The first trajectories of scattered ions from a surface semichannel consisting of five Cd and Te atoms arranged layer-by-layer in two layers were obtained. The shapes of these three types of trajectories are discussed and the energies, scattering coefficients, and inelastic energy losses of the scattered ions are calculated. It is shown that the energy values, scattering coefficient and inelastic energy losses of scattered ions from surface atomic rows differ little from each other. For ions scattered from the wall of the semichannel and from the bottom of the semichannel, the values of these parameters lie in the range.