A MEMS Electromagnetic Vibration Energy Harvester with Monolithically Integrated NdFeB Micromagnets
Abstract The monolithic integration of high‐performance magnets into microfabricated devices remains a technological challenge despite the great interest for telecommunications, automotive, biomedical or space applications. Here the integration of 50 µm thick sputtered arrays of NdFeB micromagnets into a functional micro‐electro mechanical system (MEMS) in‐plane electromagnetic vibration energy harvester is reported. A combination of analytical modeling and numerical simulations guided the design of the magnet arrays along with ad‐hoc planar coils, to produce a high transduction factor. The resulting energy harvesters deliver a voltage of 2.5 mV, a power of 6 nW under an acceleration of 0.8 g and a normalized power density of 3 × 10 −4 kg s m −3 (20 mW m −3 ) for a device volume of roughly 300 mm 3 , which is comparable to state‐of‐the‐art MEMS electromagnetic vibration harvesters. This study serves as a show‐case for the possibility of integrating high‐performance micromagnets into functional devices using microfabrication processes.
Authors
- José Elìas Angulo‐Cervera (ORCID: https://orcid.org/0000-0001-9324-7106)
- Pierre Moritz
- Liviu Nicu (ORCID: https://orcid.org/0000-0002-0124-7465)
- Richard Haettel (ORCID: https://orcid.org/0000-0001-6060-8411)
- Samuel Charlot
- Thomas Blon (ORCID: https://orcid.org/0000-0002-1177-4787)
- Thierry Leïchlé (ORCID: https://orcid.org/0000-0003-3183-8976)
- Nora M. Dempsey (ORCID: https://orcid.org/0000-0003-0402-0992)
- Fabrice Mathieu (ORCID: https://orcid.org/0000-0002-3359-7080)
- Thibaut Devillers (ORCID: https://orcid.org/0000-0001-6952-138X)
- Lise‐Marie Lacroix (ORCID: https://orcid.org/0000-0003-3351-7949)
- Ilona Lecerf
- Frederico Orlandini Keller (ORCID: https://orcid.org/0000-0002-6377-3524)
- David Bourrier (ORCID: https://orcid.org/0000-0003-0659-1924)
Institutions
- Centre National de la Recherche Scientifique (FR)
- Georgia Institute of Technology (US)
- Université Toulouse III - Paul Sabatier (FR)
- Université Fédérale de Toulouse Midi-Pyrénées (FR)
- Institut Universitaire de France (FR)
- Laboratoire d'Analyse et d'Architecture des Systèmes (FR)
- Université Bourgogne Franche-Comté (FR)
- Institut Néel (FR)
- Laboratoire de Physique et Chimie des Nano-Objets (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Journal
- Advanced Materials Technologies
- Published
- 2025-03-19
- DOI
- https://doi.org/10.1002/admt.202401817
- Citations
- 7
- Primary Topic
- Innovative Energy Harvesting Technologies
- Type
- article
- Field-Weighted Citation Impact
- 4.99
Funders
- Agence Nationale de la Recherche