Si metasurface for DUV pseudo-plasmon-enhanced molecular spectroscopy

We introduce a silicon (Si) nanostructures exhibiting pseudo-plasmon resonace and demonstrate its application for deep ultraviolet (DUV) molecular spectroscopy. Due to its strong interband transition, the permittivity of Si turns to be negative below 300 nm, allowing it to show plasmon-like resonances in the nanostructures. By properly engineering the design of the void unit cell, the metasurface shows significant field enhancement near ~260 nm. We explore the potential of the metasurfaces for surface-enhanced spectroscopy. This research expands the material choices available in DUV nanophotonics, opening up new possibilities in fields like biomedical analysis and nanomaterial development.

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Published
2025-03-19
DOI
https://doi.org/10.1117/12.3047852
Primary Topic
Silicon Nanostructures and Photoluminescence
Type
article
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article

Si metasurface for DUV pseudo-plasmon-enhanced molecular spectroscopy

M.J. Chiang, Yu-Chuan Lin, Yuri S. Kivshar, Ming Lun Tseng et al.
Silicon Nanostructures and Photoluminescence
article

Si metasurface for DUV pseudo-plasmon-enhanced molecular spectroscopy

M.J. Chiang, Yu-Chuan Lin, Yuri S. Kivshar, Ming Lun Tseng, Der‐Hsien Lien, Bor‐Ran Li, Jia‐Hua Lee, Kuan-Heng Chen, Tzu‐En Lin, Pei Ying Ho, Po Hsiang Hsu, Ray-Hua Horng, Bo Ray Lee
article en

Abstract

We introduce a silicon (Si) nanostructures exhibiting pseudo-plasmon resonace and demonstrate its application for deep ultraviolet (DUV) molecular spectroscopy. Due to its strong interband transition, the permittivity of Si turns to be negative below 300 nm, allowing it to show plasmon-like resonances in the nanostructures. By properly engineering the design of the void unit cell, the metasurface shows significant field enhancement near ~260 nm. We explore the potential of the metasurfaces for surface-enhanced spectroscopy. This research expands the material choices available in DUV nanophotonics, opening up new possibilities in fields like biomedical analysis and nanomaterial development.

Australian National University (AU), National Yang Ming Chiao Tung University (TW), National Yang Ming University Hospital (TW)
Openalex Percentile: Top 96%
Silicon Nanostructures and Photoluminescence
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Si metasurface for DUV pseudo-plasmon-enhanced molecular spectroscopy — M.J. Chiang, Yu-Chuan Lin, et al. · (2025) | TGRS Research Map | TGRS