Deep glass etching technique and machine learning-based design for glass-based metasurfaces

Glasses are expected to see increasing applications in metasurface with their superior optical properties. On the other hand, designing and fabricating high-performance glass optical devices requires not only knowledge of glass materials but also complex optical design and advanced fabrication technologies. To address this issue, we have successfully developed a rapid and high aspect ratio etching technique for glass using catalysts. Additionally, we have established a device design technology that balances manufacturability and optical performance through machine learning. This presentation will introduce demonstrations of each technology with prototyping metasurfaces.