CMOS-compatible Al2O3 low loss waveguides for ultraviolet photonics integrated circuits
Aluminium Oxide (Al₂O₃) UV waveguides were fabricated in a 200 mm CMOS pilot-line. Single mode waveguides losses were measured to be 0.6±0.17 dB/cm and 0.2±0.04 dB/cm for UV and blue wavelengths. These waveguides have been fabricated along with other passive elements such as power splitters and couplers. Additionally, the thermal heaters as active elements have been realized with a ΔPπ of 57.6±0.2 mW.
Authors
- Christian Haffner (ORCID: https://orcid.org/0000-0002-8947-5293)
- Pol Van Dorpe (ORCID: https://orcid.org/0000-0003-0918-1664)
- Chupao Lin (ORCID: https://orcid.org/0000-0001-9248-9496)
- Tangla D. Kongnyuy (ORCID: https://orcid.org/0000-0001-9063-7555)
- Stijn Jooken (ORCID: https://orcid.org/0000-0003-4787-9086)
- Zeinab Jafari (ORCID: https://orcid.org/0000-0002-0567-5790)
- Roelof Jansen (ORCID: https://orcid.org/0000-0001-6685-4699)
- Pieter Neutens (ORCID: https://orcid.org/0000-0002-0620-0033)
- Erfan Mafakheri (ORCID: https://orcid.org/0000-0003-2822-8624)
- Nicolas Le Thomas (ORCID: https://orcid.org/0000-0003-4797-9642)
- Gaudhaman Jeevanandam
- Nga Pham
- Philippe Hélin
- Shiqi Fan (ORCID: https://orcid.org/0000-0003-2813-824X)
Institutions
- Ghent University (BE)
- Laboratoire de Biophotonique et Pharmacologie (FR)
- IMEC (BE)
Publication Details
- Published
- 2025-03-19
- DOI
- https://doi.org/10.1117/12.3041427
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00