Glass-based micro-opto electromechanical systems manufactured by laser induced deep etching

We introduce a novel fabrication process for glass-based Micro Opto Electromechanical Systems (MOEMS) utilizing Laser Induced Deep Etching (LIDE). This method enables the creation of high aspect ratio structures (up to 50:1) with precise, defect-free features (<10 ± 1 µm) in various glass types such as fused silica and borosilicate glass. The fabricated glass-MOEMS include optical components, highly flexible spring structures, integrated actuators, and capacitive or piezoelectric sensing elements, demonstrating their versatility for applications such as tunable optical filters, lenses, and transparent MEMS with integrated diffractive elements. Mechanical testing, including force-displacement measurements, validated the functionality and robustness of these systems, with finite element method (FEM) simulations aligning closely with experimental results. Glass springs with dimensions of 30°µm°×°260°µm exhibited exceptional mechanical strength, with an estimated maximum breaking strength of ~1°GPa, underscoring their potential for durable and high-performance MOEMS. This work highlights the integration of LIDE with established microsystem processes such as wet etching, thin-film deposition, and anodic bonding, showcasing advancements in glass-based MOEMS for next-generation miniaturized optical and mechanical systems.