1130 nm wavelength vertical-cavity surface-emitting laser with single mode characteristics

Vertical-cavity surface-emitting lasers (VCSELs) operating at 1130 nm with single-mode characteristics are used in a variety of optical applications. In this study, we the first present to achieve single-mode characteristics of VCSEL array devices by introducing different oxide aperture sizes, and a comprehensive characterization of an 1130 nm VCSEL array focusing on its optical and electrical properties. The VCSEL array was designed and fabricated to ensure single-mode operation, which is essential for applications requiring precise beam quality and low divergence. We conducted wavelength measurements using an optical spectrum analyzer (OSA) to verify the emission wavelength accuracy and single-mode nature through beam profiling techniques. Fourteen emitter of device was fabricated, and the output power is greater than 20 mW when the aperture is 3 μm at operation current is 40 mA, a pulse width is 20 μs, a duty cycle is 50%. The performance of the device was measured, its side mode suppression ratio (SMSR) can reach > 40 dBm at temperature range of 25°C ~ 85°C, and the full width at half maximum (FWHM) of the far field angle is less than 12°. Additionally, long-term reliability tests were performed to evaluate the VCSEL's performance under different environmental conditions. The results demonstrate that the 1130 nm VCSEL array maintains stable and reliable operation, making it highly suitable for light detection and ranging (LiDAR), spectroscopy, biomedical sensing and time of-flight (ToF) applications where single-mode operation and precise wavelength control are critical.