Monte Carlo simulation of ion beam and background gas collisions

In current beam simulation software, there is no functionality specifically designed for the generation and tracking calculation of secondary particles produced during beam transport. These secondary particles are produced from collisions between the beam and background gas, as well as collisions with the electrodes. These processes can lead to beam particle loss, energy dissipation, electrode overheating, and device arcing issues. This paper addresses this challenge using Lua code based on . It enables the complete calculation of particle generation, transport, and loss processes. It overcomes four shortcomings of EAMCC and comsol, enabling it to simulate various beam types and processes beyond just the extraction of negative hydrogen ions. To demonstrate the application of this code, we investigated the neutral beam overdose issue in ion implanters, thermal deposition in large-scale ion sources, and arcing problems in electrostatic low-energy beam transport.

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Publication Details

Journal
Physical Review Accelerators and Beams
Published
2025-03-18
DOI
https://doi.org/10.1103/physrevaccelbeams.28.030101
Citations
2
Primary Topic
Plasma Diagnostics and Applications
Type
article
Field-Weighted Citation Impact
1.46

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article

Monte Carlo simulation of ion beam and background gas collisions

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2 citations
Physical Review Accelerators and Beams
Plasma Diagnostics and Applications
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article

Monte Carlo simulation of ion beam and background gas collisions

Tingru Zhu, Caijie Zhang, Dongpo Fu, Jie Li, Kai Wang, Jinghui Wang, Kun Zhu, Wei Huang, Kedong Wang, Zhiying Xu, Shixian Cai
article en
2 citations

Abstract

In current beam simulation software, there is no functionality specifically designed for the generation and tracking calculation of secondary particles produced during beam transport. These secondary particles are produced from collisions between the beam and background gas, as well as collisions with the electrodes. These processes can lead to beam particle loss, energy dissipation, electrode overheating, and device arcing issues. This paper addresses this challenge using Lua code based on . It enables the complete calculation of particle generation, transport, and loss processes. It overcomes four shortcomings of EAMCC and comsol, enabling it to simulate various beam types and processes beyond just the extraction of negative hydrogen ions. To demonstrate the application of this code, we investigated the neutral beam overdose issue in ion implanters, thermal deposition in large-scale ion sources, and arcing problems in electrostatic low-energy beam transport.

Physical Review Accelerators and BeamsVol. 28(3)
Plasma Technology (United States) (US), Key Laboratory of Nuclear Radiation and Nuclear Energy Technology (CN), State Key Laboratory of Nuclear Physics and Technology
National Natural Science Foundation of China
Openalex Percentile: Top 19%
Plasma Diagnostics and Applications
1.46
DOIOpen Access PDFOpenAlex
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