Highly Sensitive Mass Sensing Scheme via Energy Re-Localization With Un-Equally Coupled Cantilever Array

In this article, a highly sensitive mass sensing scheme with a localized un-equally coupled n-cantilever array is proposed, where n is an integer equal to or larger than four. An un-equally coupled 4-cantilever array, taking as an example, is investigated by means of establishing normalized stiffness matrix of its theoretical model, optimizing un-equally coupling overhang for mass sensitivity analysis, and carrying out experimental verification. The results indicate that compared to equally coupled one, the amplitude ratio of un-equally coupled 4-cantilever array is increased by 219% due to energy re-localization. The repeatability and linearity of the fabricated prototype are 99.17% and 99.05%, respectively, and the linear range is greater than 100 mg. The proposed scheme can be not only extended to n-cantilever array, but also explored to various fields, such as highly sensitive mass sensing, quantitative identification, and intelligent monitoring system.