Multiscale Profile Characterization Based on Atomic Force Microscopy

The accurate cross-scale measurement of surface profiles is essential in various fields, such as materials science and nanotechnology. Traditional measurement techniques, such as atomic force microscopy (AFM), provide high-resolution data but are limited in range, making it challenging to characterize surfaces with both fine and large-scale features comprehensively. This limitation creates a conflict in achieving precise, wide-range measurements necessary for advanced applications. To address this challenge, we propose a novel nested-feedback splicing measurement strategy that integrates AFM with an electrodynamic displacement system. This approach combines the high resolution of AFM with the extensive range capabilities of electrodynamic stages, allowing for detailed characterization across multiple scales. Our results demonstrate that the developed system significantly improves measurement accuracy, particularly in capturing detailed surface profiles over large areas. The experimental data validate the effectiveness of the proposed method, showing enhanced precision in multiscale topographic characterization and seamless integration between fine and large-scale measurements. This advancement paves the way for more comprehensive surface analyses in scientific research and industrial applications, highlighting the system’s potential to revolutionize precision measurement technology.