Rate coefficients for Vibrationally Inelastic Transitions of the O(3Pg)+O2(3Σ-g, v) System on the O3 Ground Electronic State Potential Energy Surface at 100-1000 K

The v>v′ rate coefficients for the vibrationally inelastic collisions of O atoms with O2 molecules are presented for vibrational quantum numbers v from 0 to 8 and temperatures from 100K to 1000K. State-to-state rate coefficients were computed theoretically using an ab initio O–O2 interaction potential for the ground state of O3 and the final rate coefficients are obtained by summing the state-to-state rate constants over final rotational states and averaging over an equilibrium Boltzmann distribution of relative translational energies and initial rotational states at temperatures of interest in plasma processes. The rate constants obtained are compared with available quasi-classical calculations. The coefficients obtained are required in the modeling of many industrial processes such as plasma etching, surface treatment, plasma sterilization, and medicine.