Experience in Application of Electrostatic Suspensions in Inertial Sensors

Concern CSRI Elektropribor, JSC, has accumulated extensive experience in the development and application of electrostatic suspensions (ESS) of sensitive masses of various inertial sensors—gyroscopes and accelerometers. The article presents the schemes that form the basis of these devices. An attempt is made to generalize the principles of construction and search for unified approaches to the creation of inertial sensors using ESS.