Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric device

This paper describes a dynamic spectroscopic ellipsometer that can extract accurate <i>Ψ</i>(<i>λ</i>) and <i>Δ</i>(<i>λ</i>) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting <i>Ψ</i>(<i>k</i>) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both <i>Ψ</i>(<i>λ</i>) and <i>Δ</i>(<i>λ</i>) by a video clip to emphasize the potential of the proposed scheme.