Patch probe for plasma resonance spectroscopy to measure electron density of edge plasma contacted chamber surfaces in a low-pressure plasmas
Abstract We propose a flexible and thin patch-type plasma resonance spectroscopy probe enough to be attached to different chamber surfaces. The patch probe, composed of thin metal and dielectric layers, can measure the plasma electron density near any surface in contact with plasma in the chamber. We confirmed that the patch probe can obtain a distribution of the electron density on different chamber surfaces where the probe is attached, namely the chuck, chamber wall, and bottom. From the results, we found variations in electron density depending on the location in the chamber under different RF power and pressure.
Authors
- GeonWoong Eom
- S. J. You (ORCID: https://orcid.org/0000-0002-8306-7643)
- Sijun Kim (ORCID: https://orcid.org/0000-0001-7782-7194)
- InYong Park
- Byonghoon Seo (ORCID: https://orcid.org/0000-0001-5782-5669)
- Jin Young Lee (ORCID: https://orcid.org/0000-0002-7771-4920)
- Daewoong Kim (ORCID: https://orcid.org/0009-0004-0841-2314)
- Min Hur (ORCID: https://orcid.org/0000-0002-6355-2182)
- Woo Seok Kang (ORCID: https://orcid.org/0000-0003-0047-4997)
- Sang-Ho Lee (ORCID: https://orcid.org/0000-0002-6243-3245)
Institutions
- Chungnam National University (KR)
- Korea Institute of Machinery & Materials (KR)
- Embry–Riddle Aeronautical University (US)
Publication Details
- Journal
- Japanese Journal of Applied Physics
- Published
- 2025-03-01
- DOI
- https://doi.org/10.35848/1347-4065/adc051
- Primary Topic
- Laser-induced spectroscopy and plasma
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- U.S. Department of Energy