Heterogeneous integration, single-mode MEMS-VCSEL with super-span resonance filtering, small divergence angle, and Gaussian distribution

Wavelength tunable vertical cavity surface emitting lasers (VCSELs) are becoming increasingly popular in wavelength-division multiplexing passive optical networks (WDM-PON). However, due to the limitations of laser beam quality, traditional designs find it difficult to achieve stable single mode emission across the entire wavelength range. Here, we designed and fabricated an electrically pumped 1060 nm heterogeneous integration (HI) super-span resonance filtering micro-electro-mechanical system (MEMS) tunable VCSEL, continuously tuning 34.41 nm at room temperature and achieving single mode laser operation across the entire tuning range. The linear polarization mode of the beam exhibits an almost ideal Gaussian distribution with a minimum divergence angle of 8.65°. This work verifies the high beam quality characteristics of single mode HI MEMS-VCSELs, demonstrating their potential application as WDM-PON light sources and providing new possibilities for various other applications.