Metrological Analysis of Models of the Relationship between the Parameters of Transparent Conductive Oxide Coatings and the Technological Modes of their Production by Spray Pyrolysis

The work is aimed at solving the problem of minimizing errors in the adequacy of models of interrelations of electrophysical, optical, and morphological parameters of transparent conductive oxide coatings by performing metrological analysis. In essence, the main goal is to identify the main causes of methodological errors, systematize them, and develop methods to reduce methodological errors in order to increase the adequacy of models. A comparative analysis of the graph model developed by the authors, showing the relationship between the properties of transparent conductive coatings and its modification, optimized on the basis of Pareto quality management methods, is performed. A method of analytical interpretation of graph models in the form of systems of differential equations is presented, which allow formalizing additional measurement errors of the properties of transparent conductive coatings due to the deviation of influencing factors from the required values. The presented results of the metrological analysis of models of the relationship between the parameters of transparent conductive oxide coatings and the technological modes of their production by spray pyrolysis are advisable to use in the development of the methodological foundations of the digital twin of the technological process. This helps to identify the required technological modes of the spray pyrolysis method in order to obtain transparent conductive oxides with the required properties.