Design of sandwich-type waveguide grating antenna with ultra-long transmission distance and high directionality
In order to make the silicon-based optical phased array(SOPA) have a small divergence angle and high directionality, and achieve high-resolution scanning, this paper proposes a sandwich-type waveguide grating antenna (SWGA) based on the Si-Si 3 N 4 -Si 3 N 4 platform, which can achieve an effective transmission distance of 1.22cm and finally obtain a divergence angle of 0.0065°. And it has a high upward directionality of 87.41%. Thanks to its large critical dimension, the proposed structure is suitable for manufacturing in complementary metal oxide semiconductor (CMOS) foundries with deep ultraviolet (DUV) lithography.
Authors
- Fuling Zhang
- Jie Zhang (ORCID: https://orcid.org/0000-0001-7821-4808)
- Zhihua Feng
- Pengfei Zhang (ORCID: https://orcid.org/0000-0002-4226-1394)
- Hang Su (ORCID: https://orcid.org/0000-0001-6573-5145)
- Yuanming Zhao
- Guanpeng Dong (ORCID: https://orcid.org/0000-0003-0949-1304)
Institutions
- Changchun University of Science and Technology (CN)
- Harbin Institute of Technology (CN)
- China Electronics Technology Group Corporation (CN)
Publication Details
- Journal
- Optics Continuum
- Published
- 2025-03-12
- DOI
- https://doi.org/10.1364/optcon.560728
- Primary Topic
- Microwave Engineering and Waveguides
- Type
- article
- Field-Weighted Citation Impact
- 0.00