Efficient reconstruction and calibration strategy for a uniaxial MEMS-based 3D reconstruction system
The micro-electro-mechanical system (MEMS) has the advantages of high frequency and low size, and the uniaxial MEMS-based 3D measurement system has attracted much attention. However, the reconstruction and calibration processes of existing methods are complicated. In this paper, an efficient 3D reconstruction method is proposed. First, the MEMS coordinate system (MCS) is established according to the mathematical model of the MEMS mirror, then the simple constraint is obtained in the MCS, and the 3D points are recovered in a triangulation-like form. Furthermore, a simple calibration method for the MCS is proposed, which requires only one calibration position to complete the calibration, greatly simplifying the calibration process. Quantitative and comparative experiments verify the feasibility and effectiveness of the proposed method.
Authors
- Zhen Peng (ORCID: https://orcid.org/0000-0001-6723-3819)
- Yao Wang (ORCID: https://orcid.org/0009-0005-9707-9687)
- Yuchen Han (ORCID: https://orcid.org/0009-0002-7136-471X)
- Ziang Chen (ORCID: https://orcid.org/0000-0002-8298-5223)
- Zhonghui Chen (ORCID: https://orcid.org/0009-0002-4412-418X)
- Lin Bin
- Wang Hengyu (ORCID: https://orcid.org/0000-0002-9193-2131)
Institutions
- China Electronics Standardization Institute (CN)
- Zhejiang University (CN)
- Taizhou University (CN)
Publication Details
- Journal
- Applied Optics
- Published
- 2025-03-11
- DOI
- https://doi.org/10.1364/ao.554997
- Citations
- 1
- Primary Topic
- Optical measurement and interference techniques
- Type
- article
- Field-Weighted Citation Impact
- 1.28
Funders
- National Key Research and Development Program of China