Coating of Self‐Sensing Atomic Force Microscopy Cantilevers with Boron‐Doped Nanocrystalline Diamond at Low Temperatures
The article “Coating of Self-Sensing Atomic Force Microscopy Cantilevers with Boron-Doped Nanocrystalline Diamond at Low Temperatures” by Štěpán Potocký et al. (2400553) explores parameters of a low-temperature microwave plasma process with a smart use of microscopic temperature gradient for localized conductive diamond coating of self-sensing atomic force microscopy cantilever probes with an integrated sensing circuit. Sensitive and durable electrical current mapping by atomic force microscopy is demonstrated on micropatterned metal layers and silicon nanodevices in air and under vacuum, a highly demanded feature in the semiconductor industry.
Authors
- Štěpán Potocký (ORCID: https://orcid.org/0000-0002-6989-4888)
- Egor Ukraintsev (ORCID: https://orcid.org/0000-0002-9768-5119)
- Alexander Kromka (ORCID: https://orcid.org/0000-0002-3531-6748)
- Jaroslav Kuliček (ORCID: https://orcid.org/0000-0002-8600-7822)
- Bohuslav Rezek (ORCID: https://orcid.org/0000-0002-0378-4598)
- Ondřej Novotný (ORCID: https://orcid.org/0000-0001-6258-9971)
Institutions
- FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic (CZ)
- Czech Technical University in Prague (CZ)
Publication Details
- Journal
- physica status solidi (a)
- Published
- 2025-03-01
- DOI
- https://doi.org/10.1002/pssa.202570009
- Citations
- 1
- Primary Topic
- Force Microscopy Techniques and Applications
- Type
- article
- Field-Weighted Citation Impact
- 1.25