Enhancement of Copper Filling by UV Irradiation on Micro-Via

Atmospheric UV treatment was devised as an environmentally friendly alternative to organic material-free etching. This alternative etching treatment method has the characteristic that it does not require any recovery or waste liquid treatment, which is essential in conventional methods. When ABS resin is irradiated by UV light, chemical bonds are charged, and the hydrophilicity of the surface is enhanced. Become to improve the adhesion strength of metal plating. Additionally, the advantage of the UV irradiation method is that it can achieve the same surface modification effect on complex objects like thorough-hole substrates.