3D Femtosecond Laser Beam Deflection for High‐Precision Fabrication and Modulation of Individual Voxelated PCM Meta‐Atoms (Adv. Sci. 9/2025)
3D Femtosecond Laser Beam DeFLection In article number 2413316, Lan Jiang and co‐workers present a PCM‐only metasurface constructed entirely of phase‐change material voxels. The three‐dimensional beam deflection method combines femtosecond laser phase modulation with 200 nm processing precision, enabling atomic‐level control of PCM meta‐atoms. This breakthrough technique advances highprecision metasurface fabrication and dynamic optical modulation capabilities. [Image: see text]
Authors
- Jintao Tong (ORCID: https://orcid.org/0000-0002-1012-9372)
- Zhehao Xu
- Xueyan Zou (ORCID: https://orcid.org/0000-0003-0373-7203)
- Jianhui Jiang (ORCID: https://orcid.org/0000-0003-3557-3311)
- Donghui Wei (ORCID: https://orcid.org/0000-0003-2820-282X)
- Lan Jiang (ORCID: https://orcid.org/0000-0003-0488-1987)
- Jie Hu (ORCID: https://orcid.org/0000-0003-4993-5758)
- Cheng Qian (ORCID: https://orcid.org/0000-0002-2077-245X)
- Weina Han (ORCID: https://orcid.org/0000-0002-2519-2104)
- Biye Peng
Publication Details
- Journal
- Advanced Science
- Published
- 2025-03-01
- DOI
- https://doi.org/10.1002/advs.202570058
- Primary Topic
- Laser Material Processing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00