FPGA-based SPI Module System Implementation for Various DPS Evaluations in ATE

The device power supply (DPS) utilized in automated test equipment (ATE) for semiconductor testing is responsible for applying and measuring voltage/current to the device under test (DUT). The choice of DPS in ATE can vary based on the equipment’s purpose, specifications, and the targeted DUT for measurement. Consequently, the efficiency of equipment development has been compromised due to different evaluation environments dictated by various DPS manufacturers. This paper addresses this challenge by proposing the establishment of a universally applicable evaluation environment for equipment development, independent of the operational specifications of DPS, leveraging field programmable gate arrays (FPGA). In this study, we initially design and validate an FPGAbased SPI communication module aligned with the specifications of Analog Devices’ AD5560, commonly applied in mass-produced semiconductor test equipment. Based on these results, we present a universal DPS evaluation environment that can be adapted to various DPS development scenarios.