A perspective on diamond MEMS magnetic sensors

Microelectromechanical system (MEMS) technology has unlocked a wide range of applications in electronics, mobility-type devices, and medical and energy generation devices from sensors and actuators to switches. Diamond, in particular, stands out for its exceptional mechanical robustness and electronic performance in extreme conditions, offering sensitivity and reliability superior to other semiconductor materials for MEMS sensors. In this perspective, we review the principles of MEMS magnetic sensors, diamond for MEMS, thermal stability of diamond MEMS resonators, and diamond MEMS magnetic sensors, particularly for the applications under high temperatures. We present the interface engineering of diamond MEMS magnetic sensors to improve the thermal stability. Finally, we discuss the potential solutions, outline future research directions, and discuss the prospects for continued progress of diamond MEMS.