Design and Simulation of a MEMS Based Surface Profilometer

With the rapid advancement of the Micro Electro Mechanical Systems (MEMS) field necessitates a focus on associated surface analysis and manipulation techniques. Existing methods, such as Atomic Force Microscopy, and Optical Interferometry, present an effective but complex approach to surface profiling. These methods often involve intricate calibration processes, and require sophisticated equipment, thereby limiting their usage. To address these challenges, this paper introduces a novel MEMS based capacitive profilometer that offers an easy accessible, and efficient solution for surface roughness measurement, while integrating surface manipulation capabilities. This proposed system is simple, compact, and highly versatile. It is capable of measuring surface roughness in the range ±10 µm, making it suitable for a wide range of applications. The sensing, and actuation mechanisms are governed by the principle of capacitance. This paper provides a detailed design analysis, simulation results, and fabrication procedure for successful implementation.