Metal-Organic Framework (MOF) Based Film Bulk Acoustic Resonator (FBAR) Sensor for Volatile Organic Compounds (VOCs) Detection
Recently, the detection of volatile organic compounds (VOCs) has received extensive attention in the field of industrial pollutants detection. As a microgravity sensor based on microelectromechanical system (MEMS), film bulk acoustic resonator (FBAR) plays an important role in the detection of micro-mass and composition. Combined with metal-organic framework (MOF), a type of porous crystal material, FBAR has the ability to adsorb micro-VOC vapor with high sensitivity. Herein, we proposed a MIL-101(Cr) MOF-based FBAR sensors with high resonant frequency and Q factor for five VOCs detection (acetone, ethanol, isopropanol, acetonitrile, and methanol), realizing high sensitivity and stable sensing performance. The experimental data shows the highest sensitivity is 35.15 Hz/ppm for acetone with the limit of detection (LOD) of 322 ppm, which can provide support in ensuring industrial production safety and VOC real-time in-situ detection.
Authors
- Dibo Hou (ORCID: https://orcid.org/0000-0002-3948-9072)
- Yunqi Cao (ORCID: https://orcid.org/0000-0001-8063-0931)
- Shuyu Fan (ORCID: https://orcid.org/0000-0002-9002-6962)
- Mengyao Fu (ORCID: https://orcid.org/0009-0000-9997-964X)
- Zhiqiang Ma (ORCID: https://orcid.org/0000-0002-7939-9901)
- Chenyang Gao (ORCID: https://orcid.org/0000-0003-2390-0792)
Institutions
- Zhejiang University (CN)
Publication Details
- Published
- 2024-11-03
- DOI
- https://doi.org/10.1109/iecon55916.2024.10905420
- Primary Topic
- Advanced Chemical Sensor Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- Research and Development