Inductor-shunted matching circuits for enhanced frequency multiplexibility in RF single electron transistors in silicon

Frequency-multiplexed radio-frequency (RF) reflectometry is a promising technique for large-scale quantum dot-based qubit systems because it enables simultaneous readout of multiple qubits and helps to reduce the wiring density in peripheral circuits. However, in the conventional L-C-type matching circuits, resonator frequency tunability is limited by poor design flexibility of the shunt capacitance and hence the circuit. Recently, L-L-type matching circuits comprising a series and a shunt inductor have been proposed to address this issue. Here, we report RF reflectometry readout of silicon quantum dot-based charge sensors embedded in L-L-type circuits. We determine the inductance values for target resonance frequencies based on our equivalent circuit model that incorporates the parasitic elements of the inductors and demonstrate resonator frequency tunability of up to 1 GHz with 3-dB resonator bandwidths on the order of MHz. The measured conductance sensitivities, on the order of 10−5(e2/h)/Hz at 4 K, are only moderately dependent on the resonance frequency up to 630 MHz. These results highlight the prospects of L-L-type matching circuits for rapid and multiplex reflectometry readout of semiconductor spin qubits.