Prototype Production of Non-standard Vacuum Seals~How to Make and Use Gold O-ring~
In order to secure the sample to the sample holder and create a structure that serves as a partition between the gas introduction system on the back of the sample and the ultra-high vacuum measurement chamber, a vacuum seal must be completed at the same time as the sample is fixed. We searched and tried sealing methods to perform permeation measurements on samples with several mm size, since standardized products such as international ConFlat flanges cannot be used for the vacuum seals in these size.
Authors
- Yoshihisa MATSUMOTO
- Akiko N. Itakura (ORCID: https://orcid.org/0000-0001-5783-141X)
- Tomoko KUSAWAKE
- Souta Miyai
- Takashi Hirayama (ORCID: https://orcid.org/0000-0001-5993-6688)
- Eiji TOKUMARU
- Kouta MIYANOUCHI
Institutions
- National Institute for Materials Science (JP)
- National Institute of Technology, Oita College (JP)
Publication Details
- Journal
- Vacuum and Surface Science
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1380/vss.68.174
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00