Prototype Production of Non-standard Vacuum Seals~How to Make and Use Gold O-ring~

In order to secure the sample to the sample holder and create a structure that serves as a partition between the gas introduction system on the back of the sample and the ultra-high vacuum measurement chamber, a vacuum seal must be completed at the same time as the sample is fixed. We searched and tried sealing methods to perform permeation measurements on samples with several mm size, since standardized products such as international ConFlat flanges cannot be used for the vacuum seals in these size.

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Publication Details

Journal
Vacuum and Surface Science
Published
2025-03-09
DOI
https://doi.org/10.1380/vss.68.174
Primary Topic
Advanced Surface Polishing Techniques
Type
article
Field-Weighted Citation Impact
0.00
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article

Prototype Production of Non-standard Vacuum Seals~How to Make and Use Gold O-ring~

Yoshihisa MATSUMOTO, Akiko N. Itakura, Tomoko KUSAWAKE, Souta Miyai et al.
4 links
Vacuum and Surface Science
Advanced Surface Polishing Techniques
article

Prototype Production of Non-standard Vacuum Seals~How to Make and Use Gold O-ring~

Yoshihisa MATSUMOTO, Akiko N. Itakura, Tomoko KUSAWAKE, Souta Miyai, Takashi Hirayama, Eiji TOKUMARU, Kouta MIYANOUCHI
article en

Abstract

In order to secure the sample to the sample holder and create a structure that serves as a partition between the gas introduction system on the back of the sample and the ultra-high vacuum measurement chamber, a vacuum seal must be completed at the same time as the sample is fixed. We searched and tried sealing methods to perform permeation measurements on samples with several mm size, since standardized products such as international ConFlat flanges cannot be used for the vacuum seals in these size.

Vacuum and Surface ScienceVol. 68(3)
National Institute for Materials Science (JP), National Institute of Technology, Oita College (JP)
Openalex Percentile: Top 96%
Advanced Surface Polishing Techniques
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