A tip-tilt-piston electrothermal micromirror array with integrated position sensors

A tip-tilt-piston 3 × 3 electrothermal micromirror array (MMA) integrated with temperature field-based position sensors is designed and fabricated in this work. The size of the individual octagonal mirror plates is as large as 1.6 mm × 1.6 mm. Thermal isolation structures are embedded to reduce the thermal coupling among the micromirror units. Results show that each micromirror unit has a piston scan range of 218 μm and a tip-tilt optical scan angle of 21° at only 5 V_dc. The micromirrors also exhibit good dynamic performance with a rise time of 51.2 ms and a fall time of 53.6 ms. Moreover, the on-chip position sensors are proven to be capable for covering the full-range movement of the mirror plate, with the measured sensitivities of 1.5 mV/μm and 8.8 mV/° in piston sensing and tip-tilt sensing, respectively. Furthermore, the thermal crosstalk in an operating MMA has been experimentally studied. The measured results are promising thanks to the embedded thermal isolation structures.