Analysis of Nonlinear Vibration Arising in Micro-Electromechanical System

In this work, the nonlinear vibration arising in the micro-electromechanical system is investigated by using the equivalent linearization method based on a weighted averaging concept. The analytical solution of the system is carried out, and the relationship between the frequency and the initial amplitude is established in a closed analytical form. In order to verify the accuracy of the present method, some illustrative examples are analyzed in detail and the results are compared with other analytical and numerical solutions.