A MEMS Pirani Vacuum Gauge Based on Porous Silicon
Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous silicon platform is designed, fabricated, and characterized. The repeatability within 4~10<sup>5</sup> Pa has been tested. The porous silicon acting as a support material achieved a porosity of 68% and a thermal conductivity of 3.5 W/(m·K), and the surface morphology of the porous silicon is smooth. The proposed MEMS Pirani vacuum gauge containing no suspended thin-film structures has good mechanical stability and is unaffected by mechanical shock and vibration in operation.
Authors
- Jifang Tao (ORCID: https://orcid.org/0000-0003-3706-5599)
- Lianggong Wen (ORCID: https://orcid.org/0000-0002-5669-7340)
- Zichao Zhang (ORCID: https://orcid.org/0000-0001-7567-5721)
- Yuzhe Lin
Institutions
- Shandong University (CN)
- City University of Hong Kong, Shenzhen Research Institute (CN)
- Beihang University (CN)
Publication Details
- Journal
- Micromachines
- Published
- 2025-02-28
- DOI
- https://doi.org/10.3390/mi16030296
- Citations
- 2
- Primary Topic
- Silicon Nanostructures and Photoluminescence
- Type
- article
- Field-Weighted Citation Impact
- 1.04
Funders
- Basic and Applied Basic Research Foundation of Guangdong Province